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Metrology is the science of measurements, and nanometrology is that part of metrology that relates to measurements at the nanoscale. Many governments and regulatory bodies worldwide have existing nanotechnology policies and are taking the preliminary steps towards nanometrology strategies, for example in support of pre-normative R&D and standardization work. The applications and economic impact of thin films for nanotechnological products are large, and extend over a wide range of industry sectors. As buried layers, thin films are core to the performance of state-of-art microelectronics and magnetic data storage devices.

Metrology and Diagnostic Techniques for Nanoelectronics highlights state of art developments in devoted to advancements in all the metrological aspects related to nanoscience and nanotechnology, critical for continuing technology scaling and product innovation. It offers an inclusive overview of engineering metrology and how it relates to micro and nanotechnology research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume, written by renowned experts in the respective fields that can be used for professionals, researcher, practitioners and students. It is a complete guide for metrology and diagnostic techniques essential for process technology, electronics packaging, and product development and debugging.

The semiconductor industry faces significant challenges to continue increasing performance and functionality of information processing. New and improved metrology and characterization is required to support these advances in density and functionality. This book brings together scientists and engineers interested in all aspects of the characterization technology needed for nanoelectronic materials and device research, development, and manufacturing.